ASML Software Engineer Salaries

71 verified profiles
Last updated on January 18, 2026
Average Annual Total Compensation is $164k

Employees at ASML as Software Engineer earn an average of $164k, mostly ranging from $143k to $306k based on 71 profiles.

👨‍💻 Male $161k Male
Average Salary : $ 161 k
👩‍💻 Female $154k Female
Average Salary : $ 154 k
For every $100 paid to men, women are paid $96
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Salary Profiles
Company
Title(Level)
Annual Salary
Experience
School
Degree
Location
Skills

Base: $184k

Stocks: $13k

Bonus: $17k

TC:$214k

12yrs
NA
Masters

Works in San Francisco, CA

Base: $182k

Stocks: $49k

Bonus: $24k

TC:$255k

2yrs
NA
Phd

Works in San Jose, CA

Base: $167k

Stocks: $26k

Bonus: $21k

TC:$214k

1yrs
NA
Phd

Works in San Jose, CA

Base: $169k

Stocks: $27k

Bonus: $22k

TC:$217k

1yrs
NA
Phd

Works in San Jose, CA

Base: $155k

Stocks: $4k

Bonus: $19k

TC:$178k

10yrs
NA
Masters

Works in San Diego, CA

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Base: $169k

Stocks: $12k

Bonus: $25k

TC:$206k

9yrs
NA
Masters

Works in San Jose, CA

Base: $95k

Stocks: -

Bonus: $9k

TC:$104k

0.5yrs
Bachelors in electrical and electronics engineering

Works in Wilton, Connecticut, United States

Base: $179k

Stocks: $25k

(Today) (69.4%) $43k

Bonus: -

TC:$205k

(Today) (8.5%) $222k

6yrs
NA
NA

Works in Los Angeles, CA

Base: $175k

Stocks: $18k

(Today) (84.0%) $32k

Bonus: -

TC:$192k

(Today) (7.7%) $207k

20yrs
NA
NA

Works in San Jose, CA

Base: $118k

Stocks: $1k

(Today) (71.4%) $1k

Bonus: -

TC:$118k

(Today) (0.4%) $119k

0yrs
NA
NA

Works in San Francisco, CA

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Showing only 50 profiles out of 71. Upgrade to view elite profiles
Level
Experience
Avg
25th
50th
75th
90th
95th
1 to 8 yrs
$128k
$116k
$122k
$NaNk
$NaNk
$NaNk
2 to 8 yrs
$148k
$143k
$149k
$NaNk
$NaNk
$NaNk
2 to 13 yrs
$184k
$177k
$186k
$NaNk
$NaNk
$NaNk
4 to 12 yrs
$237k
$214k
$219k
$NaNk
$NaNk
$NaNk
Level
Experience
1 to 8 yrs
Base
$123k
Stocks / Yr
$6k
Bonus
$14k
Total Salary
$128k
Level
Experience
2 to 8 yrs
Base
$134k
Stocks / Yr
$6k
Bonus
$16k
Total Salary
$148k
Level
Experience
2 to 13 yrs
Base
$159k
Stocks / Yr
$21k
Bonus
$23k
Total Salary
$184k
Level
Experience
4 to 12 yrs
Base
$187k
Stocks / Yr
$31k
Bonus
$33k
Total Salary
$237k
ASML Software Engineer salary levels ranges from L6 (Software Engineer) upto L9 (Software Engineer), with L9 (Software Engineer) level earning average salary of $237k along with $31k worth of stock options.

Frequently asked questions
How much do ASML Software Engineer employees make?

Employees at ASML as Software Engineer earn an average of $164k, mostly ranging from $143k per year to $306k per year based on 71 profiles. The top 10% of employees earn more than $215k per year.

What is the average salary of ASML Software Engineer?

Average salary of an employee at ASML as Software Engineer is $164k.

What is the highest salary offered at ASML as Software Engineer?

Highest reported salary offered at ASML as Software Engineer is $329k. The top 10% of employees earn more than $215k per year. The top 1% earn more than a whopping $306k per year.

What are the most common skills required at ASML as Software Engineer?

3% of employees have skills in solaris . 3% also know unix . 1% also know lithography .

What are the highest paying jobs at ASML as Software Engineer?

The top 5 highest paying jobs at ASML as Software Engineer with reported salaries are:

  • software engineer - $168k per year

  • hardware engineer - $129k per year

What are the new grad salaries at ASML as Software Engineer?
  • software engineer - $139k per year

Explore all new grad salaries

Which are the top locations?
What is the median salary offered at ASML as Software Engineer?

The median salary approximately calculated from salary profiles measured so far is $153k per year.

How is the age distributed among employees at ASML as Software Engineer?

6% of employees lie between 31-36 yrs . 4% of the employees fall in the age group of 26-31 yrs .

What qualifications do employees have at ASML as Software Engineer?

8% hold a PostGraduate degree. 3% hold a Graduate degree.

Which schools do employees working at ASML as Software Engineer went to?

1% of employees studied at Amrita Vishwa Vidyapeetham University . 1% studied at Columbia University .

Frequently asked questions
How much do ASML Software Engineer employees make?

Employees at ASML as Software Engineer earn an average of $164k, mostly ranging from $143k per year to $306k per year based on 71 profiles. The top 10% of employees earn more than $215k per year.

What is the average salary of ASML Software Engineer?

Average salary of an employee at ASML as Software Engineer is $164k.

What is the highest salary offered at ASML as Software Engineer?

Highest reported salary offered at ASML as Software Engineer is $329k. The top 10% of employees earn more than $215k per year. The top 1% earn more than a whopping $306k per year.

What are the most common skills required at ASML as Software Engineer?

3% of employees have skills in solaris . 3% also know unix . 1% also know lithography .

What are the highest paying jobs at ASML as Software Engineer?

The top 5 highest paying jobs at ASML as Software Engineer with reported salaries are:

  • software engineer - $168k per year

  • hardware engineer - $129k per year

What are the new grad salaries at ASML as Software Engineer?
  • software engineer - $139k per year

Explore all new grad salaries

Which are the top locations?
What is the median salary offered at ASML as Software Engineer?

The median salary approximately calculated from salary profiles measured so far is $153k per year.

How is the age distributed among employees at ASML as Software Engineer?

6% of employees lie between 31-36 yrs . 4% of the employees fall in the age group of 26-31 yrs .

What qualifications do employees have at ASML as Software Engineer?

8% hold a PostGraduate degree. 3% hold a Graduate degree.

Which schools do employees working at ASML as Software Engineer went to?

1% of employees studied at Amrita Vishwa Vidyapeetham University . 1% studied at Columbia University .

Salary Brackets
Percentage
< 100 k < 100 k
Percentage : 3
100-200 k 100-200 k
Percentage : 63
200-300 k 200-300 k
Percentage : 18
300-400 k 300-400 k
Percentage : 1
Age Brackets
Percentage
26-31 yrs 26-31 yrs
Percentage : 4
31-36 yrs 31-36 yrs
Percentage : 6
36-41 yrs 36-41 yrs
Percentage : 1
Skills
Trending
solaris
3 %
unix
3 %
lithography
1 %
optics
1 %
perl
1 %
python
1 %
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