ASML Software Engineer Salaries

79 verified profiles
Last updated on February 27, 2026
Average Annual Total Compensation is $168k

Employees at ASML as Software Engineer earn an average of $168k, mostly ranging from $143k to $303k based on 79 profiles.

  1,700 people laid off in the last year.
👨‍💻 Male $163k Male
Average Salary : $ 163 k
👩‍💻 Female $154k Female
Average Salary : $ 154 k
For every $100 paid to men, women are paid $94
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Salary Profiles
Company
Title(Level)
Annual Salary
Experience
School
Degree
Location
Skills

Base: $198k

Stocks: $41k

(Today) (34.2%) $55k

Bonus: $31k

TC:$270k

(Today) (5.2%) $284k

7yrs
NA
Masters

Works in San Jose, CA

Base: $188k

Stocks: $15k

(Today) (40.8%) $21k

Bonus: -

TC:$203k

(Today) (3.0%) $209k

18yrs
NA
Masters

Works in San Diego, CA

Base: $184k

Stocks: $13k

Bonus: $17k

TC:$214k

12yrs
NA
Masters

Works in San Francisco, CA

Base: $182k

Stocks: $49k

Bonus: $24k

TC:$255k

2yrs
NA
Phd

Works in San Jose, CA

Base: $167k

Stocks: $26k

Bonus: $21k

TC:$214k

1yrs
NA
Phd

Works in San Jose, CA

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Base: $169k

Stocks: $27k

Bonus: $22k

TC:$217k

1yrs
NA
Phd

Works in San Jose, CA

Base: $155k

Stocks: $4k

Bonus: $19k

TC:$178k

10yrs
NA
Masters

Works in San Diego, CA

Base: $169k

Stocks: $12k

Bonus: $25k

TC:$206k

9yrs
NA
Masters

Works in San Jose, CA

Base: $95k

Stocks: -

Bonus: $9k

TC:$104k

0.5yrs
Bachelors in electrical and electronics engineering

Works in Wilton, Connecticut, United States

Base: $184k

Stocks: $24k

(Today) (41.6%) $34k

Bonus: $28k

TC:$237k

(Today) (4.3%) $247k

8yrs
NA
NA

Works in San Jose, CA

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Showing only 50 profiles out of 79. Upgrade to view elite profiles
Level
Experience
Avg
25th
50th
75th
90th
95th
1 to 8 yrs
$131k
$117k
$123k
$NaNk
$NaNk
$NaNk
2 to 8 yrs
$148k
$143k
$149k
$NaNk
$NaNk
$NaNk
2 to 13 yrs
$188k
$178k
$186k
$NaNk
$NaNk
$NaNk
18 to 18 yrs
$203k
$203k
$203k
$NaNk
$NaNk
$NaNk
5 to 11 yrs
$241k
$214k
$235k
$NaNk
$NaNk
$NaNk
Level
Experience
1 to 8 yrs
Base
$126k
Stocks / Yr
$5k
Bonus
$13k
Total Salary
$131k
Level
Experience
2 to 8 yrs
Base
$134k
Stocks / Yr
$6k
Bonus
$16k
Total Salary
$148k
Level
Experience
2 to 13 yrs
Base
$160k
Stocks / Yr
$22k
Bonus
$24k
Total Salary
$188k
Level
Experience
18 to 18 yrs
Base
$188k
Stocks / Yr
$15k
Bonus
$0k
Total Salary
$203k
Level
Experience
5 to 11 yrs
Base
$190k
Stocks / Yr
$29k
Bonus
$32k
Total Salary
$241k
ASML Software Engineer salary levels ranges from L6 (Software Engineer) upto L9 (Software Engineer), with L9 (Software Engineer) level earning average salary of $241k along with $29k worth of stock options.

Frequently asked questions
How much do ASML Software Engineer employees make?

Employees at ASML as Software Engineer earn an average of $168k, mostly ranging from $143k per year to $303k per year based on 79 profiles. The top 10% of employees earn more than $236k per year.

What is the average salary of ASML Software Engineer?

Average salary of an employee at ASML as Software Engineer is $168k.

What is the highest salary offered at ASML as Software Engineer?

Highest reported salary offered at ASML as Software Engineer is $329k. The top 10% of employees earn more than $236k per year. The top 1% earn more than a whopping $303k per year.

What are the most common skills required at ASML as Software Engineer?

3% of employees have skills in solaris . 3% also know unix . 1% also know lithography .

What are the highest paying jobs at ASML as Software Engineer?

The top 5 highest paying jobs at ASML as Software Engineer with reported salaries are:

  • software engineer - $172k per year

  • hardware engineer - $129k per year

What are the new grad salaries at ASML as Software Engineer?
  • software engineer - $139k per year

Explore all new grad salaries

Which are the top locations?
What is the median salary offered at ASML as Software Engineer?

The median salary approximately calculated from salary profiles measured so far is $157k per year.

How is the age distributed among employees at ASML as Software Engineer?

5% of employees lie between 31-36 yrs . 4% of the employees fall in the age group of 26-31 yrs .

What qualifications do employees have at ASML as Software Engineer?

8% hold a PostGraduate degree. 3% hold a Graduate degree.

Which schools do employees working at ASML as Software Engineer went to?

1% of employees studied at Amrita Vishwa Vidyapeetham University . 1% studied at Columbia University .

Frequently asked questions
How much do ASML Software Engineer employees make?

Employees at ASML as Software Engineer earn an average of $168k, mostly ranging from $143k per year to $303k per year based on 79 profiles. The top 10% of employees earn more than $236k per year.

What is the average salary of ASML Software Engineer?

Average salary of an employee at ASML as Software Engineer is $168k.

What is the highest salary offered at ASML as Software Engineer?

Highest reported salary offered at ASML as Software Engineer is $329k. The top 10% of employees earn more than $236k per year. The top 1% earn more than a whopping $303k per year.

What are the most common skills required at ASML as Software Engineer?

3% of employees have skills in solaris . 3% also know unix . 1% also know lithography .

What are the highest paying jobs at ASML as Software Engineer?

The top 5 highest paying jobs at ASML as Software Engineer with reported salaries are:

  • software engineer - $172k per year

  • hardware engineer - $129k per year

What are the new grad salaries at ASML as Software Engineer?
  • software engineer - $139k per year

Explore all new grad salaries

Which are the top locations?
What is the median salary offered at ASML as Software Engineer?

The median salary approximately calculated from salary profiles measured so far is $157k per year.

How is the age distributed among employees at ASML as Software Engineer?

5% of employees lie between 31-36 yrs . 4% of the employees fall in the age group of 26-31 yrs .

What qualifications do employees have at ASML as Software Engineer?

8% hold a PostGraduate degree. 3% hold a Graduate degree.

Which schools do employees working at ASML as Software Engineer went to?

1% of employees studied at Amrita Vishwa Vidyapeetham University . 1% studied at Columbia University .

Salary Brackets
Percentage
< 100 k < 100 k
Percentage : 3
100-200 k 100-200 k
Percentage : 61
200-300 k 200-300 k
Percentage : 23
300-400 k 300-400 k
Percentage : 1
Age Brackets
Percentage
26-31 yrs 26-31 yrs
Percentage : 4
31-36 yrs 31-36 yrs
Percentage : 5
36-41 yrs 36-41 yrs
Percentage : 1
Skills
Trending
solaris
3 %
unix
3 %
lithography
1 %
optics
1 %
perl
1 %
python
1 %
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