ASML Engineer, Software Engineer Salaries

50 verified profiles
Last updated on April 3, 2026
Average Annual Total Compensation is $162k

Employees at ASML as Engineer, Software Engineer earn an average of $162k, mostly ranging from $134k to $311k based on 50 profiles.

  1,700 people laid off in the last year.
👨‍💻 Male $150k Male
Average Salary : $ 150 k
👩‍💻 Female $154k Female
Average Salary : $ 154 k
For every $100 paid to men, women are paid $103
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Salary Profiles
Company
Title(Level)
Annual Salary
Experience
School
Degree
Location
Skills

Base: $188k

Stocks: $15k

(Today) (27.9%) $19k

Bonus: -

TC:$203k

(Today) (2.0%) $207k

18yrs
NA
Masters

Works in San Diego, CA

Base: $184k

Stocks: $13k

Bonus: $17k

TC:$214k

12yrs
NA
Masters

Works in San Francisco, CA

Base: $184k

Stocks: $24k

(Today) (28.4%) $31k

Bonus: $28k

TC:$237k

(Today) (2.9%) $244k

8yrs
NA
NA

Works in San Jose, CA

Base: $186k

Stocks: $16k

(Today) (52.2%) $24k

Bonus: $34k

TC:$236k

(Today) (3.5%) $244k

5yrs
NA
NA

Works in San Jose, CA

Base: $179k

Stocks: $25k

(Today) (64.3%) $41k

Bonus: -

TC:$205k

(Today) (7.9%) $221k

6yrs
NA
NA

Works in Los Angeles, CA

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Base: $118k

Stocks: $2k

(Today) (35.0%) $3k

Bonus: $10k

TC:$129k

(Today) (0.5%) $130k

2yrs
NA
NA

Works in Wilton, CT

Base: $175k

Stocks: $19k

Bonus: -

TC:$194k

7yrs
NA
NA

Works in Wilton, CT

Base: $194k

Stocks: $3k

Bonus: -

TC:$197k

10yrs
NA
NA

Works in San Francisco, CA

Base: $150k

Stocks: $15k

Bonus: $21k

TC:$186k

3yrs
NA
NA

Works in San Diego, CA

Base: $196k

Stocks: $39k

Bonus: -

TC:$235k

9yrs
NA
NA

Works in San Jose, CA

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Level
Experience
Avg
25th
50th
75th
90th
95th
2 to 2 yrs
$114k
$114k
$114k
$NaNk
$NaNk
$NaNk
1 to 8 yrs
$131k
$116k
$123k
$NaNk
$NaNk
$NaNk
2 to 7 yrs
$144k
$138k
$146k
$NaNk
$NaNk
$NaNk
3 to 8 yrs
$180k
$181k
$186k
$NaNk
$NaNk
$NaNk
18 to 18 yrs
$203k
$203k
$203k
$NaNk
$NaNk
$NaNk
4 to 11 yrs
$239k
$214k
$235k
$NaNk
$NaNk
$NaNk
Level
Experience
2 to 2 yrs
Base
$104k
Stocks / Yr
$0k
Bonus
$10k
Total Salary
$114k
Level
Experience
1 to 8 yrs
Base
$124k
Stocks / Yr
$6k
Bonus
$13k
Total Salary
$131k
Level
Experience
2 to 7 yrs
Base
$129k
Stocks / Yr
$6k
Bonus
$15k
Total Salary
$144k
Level
Experience
3 to 8 yrs
Base
$156k
Stocks / Yr
$19k
Bonus
$26k
Total Salary
$180k
Level
Experience
18 to 18 yrs
Base
$188k
Stocks / Yr
$15k
Bonus
$0k
Total Salary
$203k
Level
Experience
4 to 11 yrs
Base
$188k
Stocks / Yr
$29k
Bonus
$33k
Total Salary
$239k
ASML Engineer, Software Engineer salary levels ranges from L7 (Mechanical Engineer) upto L9 (Software Engineer), with L9 (Software Engineer) level earning average salary of $239k along with $29k worth of stock options.

Frequently asked questions
How much do ASML Engineer, Software Engineer employees make?

Employees at ASML as Engineer, Software Engineer earn an average of $162k, mostly ranging from $134k per year to $311k per year based on 50 profiles. The top 10% of employees earn more than $227k per year.

What is the average salary of ASML Engineer, Software Engineer?

Average salary of an employee at ASML as Engineer, Software Engineer is $162k.

What is the highest salary offered at ASML as Engineer, Software Engineer?

Highest reported salary offered at ASML as Engineer, Software Engineer is $329k. The top 10% of employees earn more than $227k per year. The top 1% earn more than a whopping $311k per year.

What are the most common skills required at ASML as Engineer, Software Engineer?

What are the highest paying jobs at ASML as Engineer, Software Engineer?

The top 5 highest paying jobs at ASML as Engineer, Software Engineer with reported salaries are:

  • software engineer - $168k per year

  • hardware engineer - $129k per year

What are the new grad salaries at ASML as Engineer, Software Engineer?
  • software engineer - $122k per year

Explore all new grad salaries

Which are the top locations?
What is the median salary offered at ASML as Engineer, Software Engineer?

The median salary approximately calculated from salary profiles measured so far is $147k per year.

How is the age distributed among employees at ASML as Engineer, Software Engineer?

What qualifications do employees have at ASML as Engineer, Software Engineer?

Which schools do employees working at ASML as Engineer, Software Engineer went to?

Frequently asked questions
How much do ASML Engineer, Software Engineer employees make?

Employees at ASML as Engineer, Software Engineer earn an average of $162k, mostly ranging from $134k per year to $311k per year based on 50 profiles. The top 10% of employees earn more than $227k per year.

What is the average salary of ASML Engineer, Software Engineer?

Average salary of an employee at ASML as Engineer, Software Engineer is $162k.

What is the highest salary offered at ASML as Engineer, Software Engineer?

Highest reported salary offered at ASML as Engineer, Software Engineer is $329k. The top 10% of employees earn more than $227k per year. The top 1% earn more than a whopping $311k per year.

What are the most common skills required at ASML as Engineer, Software Engineer?

What are the highest paying jobs at ASML as Engineer, Software Engineer?

The top 5 highest paying jobs at ASML as Engineer, Software Engineer with reported salaries are:

  • software engineer - $168k per year

  • hardware engineer - $129k per year

What are the new grad salaries at ASML as Engineer, Software Engineer?
  • software engineer - $122k per year

Explore all new grad salaries

Which are the top locations?
What is the median salary offered at ASML as Engineer, Software Engineer?

The median salary approximately calculated from salary profiles measured so far is $147k per year.

How is the age distributed among employees at ASML as Engineer, Software Engineer?

What qualifications do employees have at ASML as Engineer, Software Engineer?

Which schools do employees working at ASML as Engineer, Software Engineer went to?

Salary Brackets
Percentage
< 100 k < 100 k
Percentage : 4
100-200 k 100-200 k
Percentage : 74
200-300 k 200-300 k
Percentage : 20
300-400 k 300-400 k
Percentage : 2
Age Brackets
No age data
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